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Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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|-  
|-  
|Pressure
|Pressure
|0.5 mTorr
|0.5 mTorr (strike pressure 10s@10mTorr)
|-
|-
|Platen chiller  temperature
|Platen chiller  temperature
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