Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1]] | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1]] | ||
The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at | The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/> | ||
The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements. | The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. this is positioned on the Sputter System Lesker instrument for in-situ measurements. | ||