Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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=== InP etch with HBr chemistry=== | === InP etch with HBr chemistry=== | ||
Work done by Aurimas Sakanas @Fotonik.dtu 2019 | Work done by Aurimas Sakanas @Fotonik.dtu 2019. This work was done to obtain very low surface roughness. | ||
{| border="1" cellspacing="2" cellpadding="3" | {| border="1" cellspacing="2" cellpadding="3" | ||
|'''Recipe name''' | |'''Recipe name''' | ||