LabAdviser/Courses: Difference between revisions

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!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription

!style="background:Black; color:white" width="10%" align ="center"|Links to course home page

~~!style="background:Black; color:white" width="10%" align ="center"|TPT SEM~~

~~!style="background:Black; color:white" width="10%" align ="center"|TPT Dry Etch~~

~~!style="background:Black; color:white" width="10%" align ="center"|TPT Thin Film~~

~~!style="background:Black; color:white" width="10%" align ="center"|Ph.d. course no. 10868 "Methods in micro and nanofabrication"~~

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!~~Mandatory ...~~

!Introduction course

|for working inside the cleanroom

~~|for working with lithography~~

|no

|for getting access to SEMs at Nanolab building 346 and 314/307

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!~~Short Course Description~~

!TPT Lithography

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|for working with lithography

|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.

|The course is recommended all users who intend to design their own masks for lithography.

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|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.

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!Mask Design

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!TPT SEM

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!TPT Dry Etch

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!TPT Thin Film

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!~~Schedule and How to sign up~~

!Ph.d. course

~~|See home page~~

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~~'''Theoretical part'''~~

!TPT Lithography

* Lecture videos that can be viewed at one's leisure.

* A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).

* '''Sign up via [https://doodle.~~com/poll/metywuzqziwps6w3 Q&E session Doodle]'''~~

~~'''Practical part'''~~

* A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).

* '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''

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* Self-~~study using screen cast videoes demonstrating the use of either CleWin og L-edit.~~

* An exercise where you are guided through the design of a mask.

* All materials are provided on the TPT Mask design page, see link below .

* An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.

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~~'''Theoretical part'''~~

* A 3-~~hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9~~:~~00 to 12~~:~~00. Sign up here: [https://danchip.doodle.com/poll/udmcihbbgudyynfy SEM lecture]~~

~~'''Practical part'''~~

* A 2-hour training session, max. 3 persons per session will be planed after the lecture

* A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample

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~~'''Theoretical part'''~~

* 3-hour lecture videos.

* After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: [https://doodle.com/poll/awkny9e952arxbxm Dry Etch TPT ~~Lecture doodle].~~

*The Question&Evaluation session takes place in room: 347-078

~~'''Practical part'''~~

* 1½ hour video explaining the equipment software.

* A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.

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~~Theoretical part~~

~~'''1st lecture (2 hours):'''~~

*An introduction to thin films

*Material properties

*Thermal oxidation

*Electroplating

~~Sign up here: [https://danchip.doodle.com/poll/k4pdm2n4bpseww5e Thinfilm lecture part1]~~

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~~'''2nd lecture (3 hours):'''~~

*Vacuum basics

*PVD (physical vapour deposition)

*CVD (chemical vapour depostion)

*ALD (atomic layer deposition)

~~Sign up here: [https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf Thinfilm lecture part2]~~

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*The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.