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Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course	Intro course	TPT Lithography	Mask Designing	TPT SEM	TPT Dry Etch	TPT Thin Film	Ph.d. course no. 10868 "Methods in micro and nanofabrication"
Mandatory ...	for working inside the cleanroom	for working with lithography	no	for getting access to SEMs at Nanolab building 346 and 314/307	for getting access to dry etch equipment	for getting access to thinfilm deposition/growth equipment	for ph.d. students at Nanolab
Short Course description		The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.	The course is recommended all users who intend to design their own masks for lithography.	the course includes theory on SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab (building 346/314/307).	the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment.	This is a theoretical course introducing the deposition and growth techniques available at DTU NAnolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.	This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.
Schedule and How to sign up	See home page	Theoretical part Lecture videos that can be viewed at one's leisure. A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). Sign up via Q&E session Doodle Practical part A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). Sign up via Training session Doodle	Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit. An exercise where you are guided through the design of a mask. All materials are provided on the TPT Mask design page, see link below . An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.	Theoretical part A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: SEM lecture Practical part A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample	Theoretical part 3-hour lecture videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: Dry Etch TPT Lecture doodle. The Question&Evaluation session takes place in room: 347-078 Practical part 1½ hour video explaining the equipment software. A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.	Theoretical part 1st lecture (2 hours): An introduction to thin films Material properties Thermal oxidation Electroplating Sign up here: Thinfilm lecture part1 2nd lecture (3 hours): Vacuum basics PVD (physical vapour deposition) CVD (chemical vapour depostion) ALD (atomic layer deposition) Sign up here: Thinfilm lecture part2	The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points
Link to course page - info and preparation material.	introduction course information on the Nanolab homepage	TPT Lithography	Mask Design	TPT SEM	TPT Dry Etch	TPT Thin Film	10868 Methods in micro and nano fabrication

Theoretical part

• Lecture videos that can be viewed at one's leisure.
• A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30).
• Sign up via Q&E session Doodle

Practical part

• A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30).
• Sign up via Training session Doodle

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|- !Location | Theoretical part

• The location of the "questions and exercises" session is room 121A in building 345C.

Practical part

• The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.

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|- !Qualified Prerequisites |

• Cleanroom safety course at DTU Danchip
• Admission to the cleanroom must be obtained before the training session
• Theoretical part must be completed before the training session.

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|- !Preparations | Before the "questions and exercises" session

• Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography (Available online from DTU campus).
• Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.

Before training session

• Complete the theoretical part (Q&E)
• Watch the training videos of spin coating (automatic), exposure (operation + alignment), and development (automatic).
• Study the equipment manuals. The manuals are available in LabManager.
• Study the TPT process flows (first print + alignment).

Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below. |-

|- !Course Responsible | The Lithography Group at DTU Danchip lithography@danchip.dtu.dk.

Sign up for the course using Doodle (links under schedule). |-

|- !Learning Objectives |

• Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
• Authorization to use spin coater, mask aligner, and developer at DTU Danchip
• Calculate relevant process parameters
• Analyze and apply your results of lithographic processing

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• UV Mask Aligner: Aligner: MA6 - 2 or KS Aligner
• Automatic Puddle Developer: Developer: TMAH UV-lithography

Process Flows

• TPT first print process flow
• TPT alignment process flow

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.

Thin film tool package training (TPT)
Schedule	Theoretical part 1st lecture (2 hours): An introduction to thin films Material properties Overview of different thin film techniques at DTU Nanolab – 1st part: Thermal oxidation Electroplating Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e 2nd lecture (3 hours): Vacuum basics Overview of different thin film techniques at DTU Nanolab – 2nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	None
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Slides from the lectures

Slides from lecture 1

• Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx

Slides from lecture 2

• Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx

PhD course (10868 Methods in micro and nano fabrication)

DTU Nanolab offers a PhD course: | 10868 Methods in micro and nano fabrication

This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.

The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.

The TPT courses presented above is a main part of the course.

The course gives you 5 ECTS points -->