Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions
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==Pegasus 4 - 150mm silicon oxide and silicon nitride etching== | ==Pegasus 4 - 150mm silicon oxide and silicon nitride etching== | ||
'''The tool is currently being installed - we hope that it will be available | '''The tool is currently being installed - we hope that it will be available in the second half of 2019. Some gasses needed for silicon oxide etching has not been installed yet | ||
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[[Image:Twinx.jpg |frame|left|x300px|The twin Pegasi (3 and 4) have just been rolled into the lab on July 3rd 2018. ]] | [[Image:Twinx.jpg |frame|left|x300px|The twin Pegasi (3 and 4) have just been rolled into the lab on July 3rd 2018. ]] | ||
Revision as of 07:53, 24 June 2019
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Pegasus 4 - 150mm silicon oxide and silicon nitride etching
The tool is currently being installed - we hope that it will be available in the second half of 2019. Some gasses needed for silicon oxide etching has not been installed yet
