Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
| Line 448: | Line 448: | ||
*Top side alignment | *Top side alignment | ||
*Backside alignment | *Backside alignment | ||
*Field alignment | *Field alignment (chip TSA) | ||
|- | |- | ||
| Line 448: | Line 448: | ||
*Top side alignment | *Top side alignment | ||
*Backside alignment | *Backside alignment | ||
*Field alignment | *Field alignment (chip TSA) | ||
|- | |- | ||