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== Pattern Design ==
== Pattern Design ==


For making a pattern on a substrate it is necescary to use a software tool to design the pattern layout. This counts for all kind of lithography and laser cutting. There are a number of differernt software tools that can be used, some of the more commonly used are:
For making a pattern on a substrate it is necessary to use a software tool to design the pattern layout. This counts for all kind of lithography and laser cutting. There are a number of differernt software tools that can be used, some of the more commonly used are:
   
   
* CleWin
* CleWin
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* Autocad
* Autocad


At Danchip we offer all users '''free access to CleWin 5''' for their mask layout. We have at least 50 floating licenses for concurrent usage.
At Danchip we offer all users '''free access to CleWin 5''' for their mask layout.


There are two ways to use the software:
[[/CleWin#CleWin 5 - local installation|'''Installation''' ]] of the CleWin 5 software on your local computer: [[/CleWin#CleWin 5 - local installation|Click here for guidelines.]]
* [[/CleWin#CleWin 5 - local installation|'''With installation''' ]] (recommended) of the CleWin 5 software on your local computer and obtaining a license from the DTU license server. [[/CleWin#CleWin 5 - local installation|Click here for guidelines.]]
* [[/CleWin#CleWin 5 - without installation|'''Without installation.''']] You log on to a terminal server where the software is already installed and you use it right away. [[/CleWin#CleWin 5 - without installation|Click here for guidelines.]]


Find the official [[Media:CleWin5UserGuide.pdf‎ |CleWin 5 User Guide here.]] The last document can also be found in the CleWin 5 installation directory (C:\Program Files (x86)\CleWin5) if you have made a local installation.
Find the official [[Media:CleWin5UserGuide.pdf‎ |CleWin 5 User Guide here.]] The last document can also be found in the CleWin 5 installation directory of your local installation.
 
If you have a Mac or Linux computer look [[/CleWin#Working with a Mac or Linux computer |here]].


=== Layout file format===
=== Layout file format===
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* For '''DUV-lithography''' and DUV-lithography it is necescary to have physical masks (reticles) produced based on the layout file. The file format has to be GDS. For more details concerning the design of reticles see [[Specific_Process_Knowledge/Lithography/DUVStepperLithography#Process_information|Design of Reticles]].
* For '''DUV-lithography''' and DUV-lithography it is necescary to have physical masks (reticles) produced based on the layout file. The file format has to be GDS. For more details concerning the design of reticles see [[Specific_Process_Knowledge/Lithography/DUVStepperLithography#Process_information|Design of Reticles]].
===Mask drawing with Matlab and AutoCAD===
To come soon


== Mask Fabrication for UV-lithography ==
== Mask Fabrication for UV-lithography ==
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