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Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

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Choi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, danchip
641 edits
Choi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, danchip
641 edits
Line 38: Line 38:
|'''Link to safety APV and KBA'''
|'''Link to safety APV and KBA'''
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]  
[https://kemibrug.dk/Kemikalier?stofnavn=BHF See SDS here (requires Kemibrug login)]  
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]  
|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]  
|-
|-
Line 75: Line 75:
!Batch size
!Batch size
|
|
1-5 4" in beaker
1-5 wafers in beaker
1-25 wafers at a time in PP-etch bath
|
|
1-5 4" wafer at a time
1-5 wafers in beaker
|-
|-


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