Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions

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|'''Location'''
|'''Location'''
|Cleanroom F-1
|Check LabManager
|Cleanroom E-5
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|Cleanroom D-3
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|Cleanroom D-3
|Check LabManager
|Cleanroom F-3
|Check LabManager
|Cleanroom B-1
|Check LabManager
|Cleanroom A-5
|Check LabManager
|Cleanroom A-5
|Check LabManager
|Cleanroom A-5
|Check LabManager
|Cleanroom D-3
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|Cleanroom C-1
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|Cleanroom E-4
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|Cleanroom E-5
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|-  
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|'''Special features'''
|'''Special features'''

Revision as of 14:32, 26 October 2018

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Zeiss Jenatech (strain) Nikon SMZ 1500 Leica S8 APO Leitz Medilux Zeiss Axiotron 2 Zeiss Jenatech (particles measurements) Noco IR microscope Nikon SMZ 1000 Nikon ME 600 Nikon Eclipse L200 Nikon Eclipse L200 (2) Nikon ECLIPSE L200N 3 Nikon ECLIPSE L200N 4
Location Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager
Special features Wollastron prism Stereoscopic microscope Stereoscopic microscope No No No Infra red (IR) camera Stereoscopic microscope Wollastron prism Motorized stage

auto scan guide

No No No
Ocular magnification 10x No No 10x 10x 10x 10x No 10x 10x 10x 10x 10x
Objective magnification 2.5x, 5x, 10x, 20x, 50x Zoom 100x Zoom 80x 2.5x, 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 20x, 50x Zoom 100x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x
Bright field Yes No No Yes Yes Yes Yes No Yes Yes Yes Yes Yes
Dark field Yes No No No Yes Yes No No Yes Yes Yes Yes Yes
Polarizer Yes No No No No Yes No No Yes No No No No
Episcopic light (reflected light) Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
Diascopic light (transmitted light) No Yes No Yes Yes No Yes No No Yes Yes Yes Yes
View with eye Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
View on screen (camera) Yes No No Yes Yes No Yes (IR) No Yes Yes Yes Yes Yes
Measurement option No No No No Yes No No No No Yes Yes Yes Yes


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage (located in D-3) Nikon Eclipse L200 auto scan guide

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