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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,304 edits
Line 63: Line 63:
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| C<sub>4</sub>F<sub>8</sub>: 0-100 sccm
| C<sub>4</sub>F<sub>8</sub>: 0-100 sccm
| Ar: 0-100 sccm
| Ar: 0-300 sccm
|-
|-
| CF<sub>4</sub>: 0-100 sccm
| CF<sub>4</sub>: 0-100 sccm
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