Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide: Difference between revisions
| Line 70: | Line 70: | ||
* 1 - 2 Å/s | * 1 - 2 Å/s | ||
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* 0. | * 0.06 nm/min - 0.40 nm/min (very recipe and temperature dependent) | ||
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| Line 70: | Line 70: | ||
* 1 - 2 Å/s | * 1 - 2 Å/s | ||
| | | | ||
* 0. | * 0.06 nm/min - 0.40 nm/min (very recipe and temperature dependent) | ||
|- | |- | ||