Specific Process Knowledge/Characterization/XRD: Difference between revisions
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== XRD SmartLab == | == XRD SmartLab == | ||
The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm. | |||
[[image:Cluster1.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | [[image:Cluster1.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | ||
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=428 RIE1 in LabManager] | ||
== Process information == | == Process information == | ||