Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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! style="background:WhiteSmoke; color:black" | MP0636 | ! style="background:WhiteSmoke; color:black" | MP0636 | ||
| style="background:WhiteSmoke; color:black"| MP0641 | | style="background:WhiteSmoke; color:black"| MP0641 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| CP0170 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| CP0171 | ||
|- valign="top" | |- valign="top" | ||
! style="background:lightgrey; color:black" | Electrode size | ! style="background:lightgrey; color:black" | Electrode size | ||
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|} | |} | ||
== General Pegasus information == | == General Pegasus information == | ||