Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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|style="background:whitesmoke; color:black"|Pressure and temperature | |style="background:whitesmoke; color:black"|Pressure and temperature | ||
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* Pressure range 4 to 250 mTorr | |||
* Temperature range -20 to 30 degrees C | |||
|style="background:WhiteSmoke; color:black"| | |||
* Pressure range 4 to 250 mTorr | |||
* Temperature range -20 to 30 degrees C | |||
|style="background:WhiteSmoke; color:black"| | |||
* Pressure range 4 to 250 mTorr | |||
* Temperature range -20 to 30 degrees C | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Pressure range 4 to 250 mTorr | * Pressure range 4 to 250 mTorr | ||