Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 170: | Line 170: | ||
* Ar: 0 to 283 sccm | * Ar: 0 to 283 sccm | ||
|style="background:lightgrey; color:black"| | |style="background:lightgrey; color:black"| | ||
SF<sub>6</sub> | * SF<sub>6</sub> | ||
O<sub>2</sub> | * O<sub>2</sub> | ||
C<sub>4</sub>F<sub>8</sub> | * C<sub>4</sub>F<sub>8</sub> | ||
Ar | * Ar | ||
|style="background:lightgrey; color:black"| | |style="background:lightgrey; color:black"| | ||
{| | {| | ||