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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment  
|style="background:WhiteSmoke; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| DRIE-Pegasus 1]]
|style="background:WhiteSmoke; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']]
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!style="background:silver; color:black;" align="center" valign="center" width="80" rowspan="2"|Purpose  
!style="background:silver; color:black;" align="center" valign="center" width="80" rowspan="2"|Purpose