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'''Hardware changes'''
'''Hardware changes'''


A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed below.
A few hardware modifications have been made on the Pegasus since it was installed in 2010. The changes are listed in the table below under hardware options.
 
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|Change of showerhead in December 2014]]
 
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope|Addition of Picoscope oscilloscope system for process monitoring in February 2017]]
 
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Claritas|Addition of a Claritas optical endpoint system in June 2018]]




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