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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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| style="background:WhiteSmoke; color:black"| ?
| style="background:WhiteSmoke; color:black"| ?
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | Electrode size
! style="background:lightgrey; color:black" | Electrode size
! style="background:WhiteSmoke; color:black" | 4"
| style="background:lightgrey; color:black" | 4"
| style="background:WhiteSmoke; color:black"| 6"
| style="background:lightgrey; color:black" | 6"
| style="background:WhiteSmoke; color:black"| 6"
| style="background:lightgrey; color:black" | 6"
| style="background:WhiteSmoke; color:black"| 6"
| style="background:lightgrey; color:black" | 6"
|- valign="top"
! style="background:lightgrey; color:black" | Manufactured
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" | ?
| style="background:lightgrey; color:black" | ?
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | Hardware options
! style="background:Whitesmoke; color:black" | Hardware options