Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
Appearance
| Line 76: | Line 76: | ||
| style="background:WhiteSmoke; color:black"| ? | | style="background:WhiteSmoke; color:black"| ? | ||
|- valign="top" | |- valign="top" | ||
! style="background: | ! style="background:lightgrey; color:black" | Electrode size | ||
| style="background:lightgrey; color:black" | 4" | |||
| style="background: | | style="background:lightgrey; color:black" | 6" | ||
| style="background: | | style="background:lightgrey; color:black" | 6" | ||
| style="background: | | style="background:lightgrey; color:black" | 6" | ||
|- valign="top" | |- valign="top" | ||
! style="background:Whitesmoke; color:black" | Hardware options | ! style="background:Whitesmoke; color:black" | Hardware options | ||