Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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! style="background:Whitesmoke; color:black" | Purpose (current or intended) | ! style="background:Whitesmoke; color:black" | Purpose (current or intended) | ||
| style="background:WhiteSmoke; color:black" | 4" silicon etch workhorse | |||
| style="background:WhiteSmoke; color:black"| Research tool with very limited number of users | | style="background:WhiteSmoke; color:black"| Research tool with very limited number of users | ||
| style="background:WhiteSmoke; color:black"| 6" silicon etch workhorse | | style="background:WhiteSmoke; color:black"| 6" silicon etch workhorse | ||