Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| DRIE-Pegasus 3]] | ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| DRIE-Pegasus 3]] | ||
! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]] | ! style="background:silver; color:black" | [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4| DRIE-Pegasus 4]] | ||
|- valign="top" | |||
! style="background:lightgrey; color:black" | Manufactured | |||
| style="background:lightgrey; color:black" | 2010 | |||
| style="background:lightgrey; color:black" | 2010 | |||
| style="background:lightgrey; color:black" | ? | |||
| style="background:lightgrey; color:black" | ? | |||
|- valign="top" | |- valign="top" | ||
! style="background:Whitesmoke; color:black" | Serial | ! style="background:Whitesmoke; color:black" | Serial | ||
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| style="background:WhiteSmoke; color:black"| ? | | style="background:WhiteSmoke; color:black"| ? | ||
| style="background:WhiteSmoke; color:black"| ? | | style="background:WhiteSmoke; color:black"| ? | ||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | Electrode size | |||
! style="background:WhiteSmoke; color:black" | 4" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
|- valign="top" | |- valign="top" | ||
! style="background:lightgrey; color:black" | Manufactured | ! style="background:lightgrey; color:black" | Manufactured | ||
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| style="background:lightgrey; color:black" | ? | | style="background:lightgrey; color:black" | ? | ||
| style="background:lightgrey; color:black" | ? | | style="background:lightgrey; color:black" | ? | ||
|- valign="top" | |- valign="top" | ||
! style="background:Whitesmoke; color:black" | Hardware options | ! style="background:Whitesmoke; color:black" | Hardware options | ||