Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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! style="background:Whitesmoke; color:black" | Electrode size | |||
! style="background:WhiteSmoke; color:black" | 4" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
| style="background:WhiteSmoke; color:black"| 6" | |||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | Hardware options | |||
! style="background:WhiteSmoke; color:black" | | |||
* Picoscope oscilloscope | |||
* Claritas endpoint system | |||
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*Picoscope oscilloscope | |||
| style="background:WhiteSmoke; color:black"| ? | |||
| style="background:WhiteSmoke; color:black"| ?|- | |||
|} | |} | ||