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Line 70: |
| | style="background:lightgrey; color:black" | Barc etch | | | style="background:lightgrey; color:black" | Barc etch |
| | style="background:lightgrey; color:black" | Silicon etcher | | | style="background:lightgrey; color:black" | Silicon etcher |
| |- valign="top"
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| ! rowspan="7" style="background:silver; color:black" | General description
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| ! style="background:WhiteSmoke; color:black" | Plasma source
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| | style="background:WhiteSmoke; color:black" | Inductively coupled plasma chamber with two RF generators; the coil and platen generator
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| | style="background:WhiteSmoke; color:black" | Inductively coupled plasma chamber with two RF generators; the coil and platen generator
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| | style="background:WhiteSmoke; color:black" | Inductively coupled plasma chamber with two RF generators; the coil (with outer and inner coil) and platen generator
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| | style="background:WhiteSmoke; color:black" | Inductively coupled plasma chamber with two RF generators; the coil and platen generator
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| | style="background:WhiteSmoke; color:black" | Parallel plate capacitor setup with RF power between the two electrodes
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| | style="background:WhiteSmoke; color:black" | Inductively coupled plasma chamber with two RF generators; the coil and platen generator
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| |-valign="top"
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| ! style="background:lightgrey; color:black" | Substrate cooling/temperature
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| | style="background:lightgrey; color:black" | The electrode is oil cooled. Also, Helium backside cooling: -10<sup>o</sup>C to 20<sup>o</sup>C
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| | style="background:lightgrey; color:black" | The electrode is oil cooled. Also, Helium backside cooling: -10<sup>o</sup>C to 60<sup>o</sup>C
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| | style="background:lightgrey; color:black" | The electrode is oil cooled. Also, Helium backside cooling: -20<sup>o</sup>C to 30<sup>o</sup>C
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| | style="background:lightgrey; color:black" | The electrode is oil cooled. Also, Helium backside cooling: -10<sup>o</sup>C to 50<sup>o</sup>C
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| | style="background:lightgrey; color:black" | The electrode is oil cooled: Fixed at 20<sup>o</sup>C
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| | style="background:lightgrey; color:black" | The electrode is oil cooled with a special chiller. Also, Helium backside cooling: 20<sup>o</sup>C to 180<sup>o</sup>C
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| |-valign="top"
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| ! style="background:WhiteSmoke; color:black" | Clamping
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| | style="background:WhiteSmoke; color:black" | Electrostatic clamping (semco electrode)
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| | style="background:WhiteSmoke; color:black" | Electrostatic clamping (TDESC)
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| | style="background:WhiteSmoke; color:black" | Electrostatic clamping (TDESC)
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| | style="background:WhiteSmoke; color:black" | Electrostatic clamping (TDESC)
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| | style="background:WhiteSmoke; color:black" | No clamping
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| | style="background:WhiteSmoke; color:black" | Mechanical clamping (weighted clamp with ceramic fingers)
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| |}
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| |- | | |- |
| |} | | |} |
