Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
| Line 6: | Line 6: | ||
== The DRIE Pegasus tools at Danchip == | == The DRIE Pegasus tools at Danchip == | ||
In 2010 Danchip acquired DRIE-Pegasus 1 (at the time called DRIE-Pegasus). As a state-of-the-art etch tool with excellent performance and great flexibility, it grew immensely popular and by 2015 it was apparent that we needed yet another tool to cope with the demand. Therefore, in 2016 Pegasus 2 was acquired from a closed-down lab in Morocco and installed next to Pegasus 1. | |||
[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom A-1]] | [[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom A-1]] | ||