Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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	== The DRIE Pegasus 1 at Danchip ==		== The DRIE Pegasus tools at Danchip ==

	[[Image:DRIE-Pegasus.jpg \|300x300px\|thumb\|The SPTS Pegasus in the Danchip cleanroom A-1]]		[[Image:DRIE-Pegasus.jpg \|300x300px\|thumb\|The SPTS Pegasus in the Danchip cleanroom A-1]]