Revision as of 10:58, 17 May 2018

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=

Write a short description of the equipment(s).

Image(s) of the equipment(s)

The user manual, user APV, and contact information can be found in LabManager:

Link to process pages - e.g. one page for each material

Example:

Equipment		Equipment 1	Equipment 2
Purpose		Purpose 1 Purpose 2	Purpose 1 Purpose 2 Purpose 3
Performance	Response 1	Performance range 1 Performance range 2	Performance range 1 Performance range 2 Performance range 3
Performance	Response 2	Performance range	Performance range
Process parameter range	Parameter 1	Range	Range
Process parameter range	Parameter 2	Range	Range
Substrates	Batch size	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers
	Allowed materials	Allowed material 1 Allowed material 2	Allowed material 1 Allowed material 2 Allowed material 3

@@ Line 21: / Line 21: @@
-'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''
+'''The user manual, user APV, and contact information can be found in LabManager:'''
-<!-- remember to remove the type of documents that are not present -->
+<!-- remember to remove the type of documents that are not present: quality control procedure(s) and results, technical information -->
 <!-- give the link to the equipment info page in LabManager: -->
-[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=326  RIE1 in LabManager]
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169  E Beam Evaporator (Temescal) in LabManager]
 == Process information ==