Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
Appearance
| Line 43: | Line 43: | ||
**0.65 ml/s @ 0.2 bar | **0.65 ml/s @ 0.2 bar | ||
*'''Pink (0.024"):''' | *'''Pink (0.024"):''' | ||
** | **0.5? ml/s @ 0.1 bar | ||
*'''Grey (0.047"):''' | *'''Grey (0.047"):''' | ||
**~2.5 ml/s @ 0.1 bar | **~2.5 ml/s @ 0.1 bar | ||