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Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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=Wet Aluminium Etch=
=Wet Aluminium Etch=
[[Image:BHF-PolySi-Al-etch.JPG|300x300px|thumb|Aluminium Etch bath located in left side of Wet bench 05 in cleanroom D-3]]
[[Image:AlEtch.jpg|300x300px|thumb|Aluminium Etch bath located in left side of Wet bench 05 in cleanroom D-3]]


Wet etching of aluminium is done with two different solutions:
Wet etching of aluminium is done with two different solutions: