Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions

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 Wet etching of aluminium is done with two different solutions:
-# H<sub>2</sub>O:H<sub>3</sub>PO<sub>4</sub>  1:2 at 50 <sup>o</sup>C
+# H<sub>2</sub>O : H<sub>3</sub>PO<sub>4</sub>  (1:2) at 50<sup>o</sup>C
-# Pre-mixed etch solution: PES 77-19-04 at 20 <sup>o</sup>C
+# Pre-mixed etch solution: PES 77-19-04 at 20<sup>o</sup>C
-Both solutions are used in the Aluminium etch bath shown to the right. It must be written on which one is in. Solution no. 1 is the most used solution for etching aluminium. Solution no. 2 is primarily for etching aluminium mixed with a small percentage of silicon.
+<br>
+The first solution is always available ready made in the Aluminium Etch bath. The second solution can be mixed manually or bought pre-mixed and ready for use. Please contact DTU Danchip if you need to use the PES 77-19-04 etch mixture. Since it is used only very rarely it may have to be ordered when needed. The table below summarizes possibilities and parameter for the two etch mixtures.
-'''The user manual and contact information can be found in LabManager:'''
-<!-- remember to remove the type of documents that are not present -->
-[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=381 Al-etch info page in LabManager]
 ==Comparing the two solutions==
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 !General description
 |Etch of pure aluminium
-|Etch of aluminium + 1.5% Si
+|Etch of aluminium with 1.5% Si
 |-