Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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[[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom F-2.]] | [[image:Dektak 8 new position.JPG|275x275px|right|thumb|Dektak 8: positioned in cleanroom F-2.]] | ||
Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micro- and nanometer range. It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. | Dektak 8 stylus profiler is a product of Veeco Instruments. It is usable for profiling surfaces of samples with structures in the micro- and nanometer range. However, the size of the structures that can be measured is limited by the tip dimensions. | ||
It can measure in a specific point found with help from high magnification video cameras or it can be programmed to measure several points defined with respect to some deskew points. It can also be used for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] of thin films by measuring the wafer bow. | |||
To get some product information and some tips and tricks from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=6&pid=32] | To get some product information and some tips and tricks from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=6&pid=32] | ||