Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions
| Line 43: | Line 43: | ||
|style="background:LightGrey; color:black"|Temperature | |style="background:LightGrey; color:black"|Temperature | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Max 1000 <sup>o</sup>C | ||
*Temperature ramp-up rate: Max 10 <sup>o</sup>C/min | *Temperature ramp-up rate: Max 10 <sup>o</sup>C/min | ||
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature) | *Temperature ramp-down rate: Relative slow (depending on the furnace temperature) | ||
| Line 50: | Line 50: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Vacuum | |style="background:LightGrey; color:black"|Vacuum | ||