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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,331 edits
Line 55: Line 55:
|style="background:LightGrey; color:black"|Vacuum
|style="background:LightGrey; color:black"|Vacuum
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Yes, but using N<sub>2</sub> and O<sub>2</sub> process gasses
*No
|-
|-
|style="background:LightGrey; color:black"|Nitrogen flows
|style="background:LightGrey; color:black"|Nitrogen flows
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