Specific Process Knowledge/Characterization/Probe station: Difference between revisions
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'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=169 | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=169 Probe station]''' | ||
Revision as of 13:45, 21 June 2017
Probe Station
Feedback to this page: Station click here
The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.
The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need.
File:Probestation.jpg
Probe station: positioned in Service room CX1
The user manual, technical information and contact information can be found in LabManager: