Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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<gallery caption="Different places to do wet silicon oxide etch" widths="220px" heights="225px" perrow="5"> image:BHF | <gallery caption="Different places to do wet silicon oxide etch" widths="220px" heights="225px" perrow="5"> image:BHF clean.JPG|BHF clean in D-3. Wet silicon oxide etch bath positioned to the right in the wetbench. This bath can also be used for BHF with wetting agent. | ||
image:KOH3 RR4 1.JPG|BHF in cleanroom D-3 (Oxide etch 1: BHF ".) The BHF bath is positioned in the middle of the bath. This is primarily used to remove oxide before and after a Si etch etch. | image:KOH3 RR4 1.JPG|BHF in cleanroom D-3 (Oxide etch 1: BHF ".) The BHF bath is positioned in the middle of the bath. This is primarily used to remove oxide before and after a Si etch etch. | ||
image:BHF-PolySi-Al Etch.jpg|BHF etch in RCA bench in B-1. | image:BHF-PolySi-Al Etch.jpg|BHF etch in RCA bench in B-1. | ||