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Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions

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!Size of substrate
!Size of substrate
|2"-6" wafers
|2"-6" wafers
|2"- 4" wafers or any that fits in a dedicated holder
|2"- 6" wafers or any that fits in a dedicated holder
|2"- 4" wafers or any that fits in a dedicated holder
|2"- 4" wafers or any that fits in a dedicated holder
|-
|-
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