Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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|style="background:LightGrey; color:black"|Deposition temperature | |style="background:LightGrey; color:black"|Deposition temperature | ||
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Maximum 450 <sup>o</sup>C | Maximum 450 <sup>o</sup>C | ||
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|style="background:LightGrey; color:black"|Thermal precursors | |style="background:LightGrey; color:black"|Thermal precursors | ||