Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions

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	Argon is used as a sputter gas to generate a plasma in the sputter chamber and to vent the chamber.		Argon is used as a sputter gas to generate a plasma in the sputter chamber and to vent the chamber.

	The ~~Balzer sputter~~ coater is located in the 346 basement, room 907 (next to the SEM Supra 1) .		The Sputter coater 03 (Cressington) is located in the 346 basement, room 907 (next to the SEM Supra 1) .