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Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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A short presentation with some information about the ALD tool can be found [[Media:ProcessMeeting ALD 2013-12-06_1.pdf|here]].


'''The user manual, the user APV and contact information can be found in LabManager:'''
'''The user manual, the user APV and contact information can be found in LabManager:'''


!![http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=321 ALD Picosun R200 info page in LabManager],!! ALD1 skal ændres når ALD2 siden bliver klar
!![http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=365 ALD 2 (PEALD) info page in LabManager]


== Process information ==
== Process information ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/ALD2_(PEALD)"