Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions
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== Process information == | == Process information == | ||
*[[/Standard recipes on the | *[[/Standard recipes on the ALD2 tool|Standard recipes on the ALD tool]] | ||
*[[/ALD multilayers|Advanced recipes involving fabrication of multilayers]] | *[[/ALD multilayers|Advanced recipes involving fabrication of multilayers]] | ||
*[ | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD Al<sub>2</sub>O<sub>3</sub> deposition using '''ALD1'''] | ||
*[ | *[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD TiO<sub>2</sub> deposition using '''ALD1'''] | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||