Specific Process Knowledge/Thermal Process/Jipelec RTP: Difference between revisions
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*III-V materials (on graphite carrier) | *III-V materials (on graphite carrier) | ||
*Silicon wafers (new from the box or RCA cleaned) | *Silicon wafers (new from the box or RCA cleaned) | ||
*In doubt: look at [http:// | *In doubt: look at [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=164 the cross contamination chart] or send a mail to [mailto:furnace@danchip.dtu.dk the Furnace group]. | ||
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