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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
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<sup>1)</sup> Not implemented yet.
<sup>1)</sup> Not implemented yet.
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=Template recipes=
Template recipe names and list of the steps in the respective template recipes.
==Manual dispense==
*'''1 TMPLT man disp'''
Spin-off; deceleration.
*'''1 TMPLT man disp spread'''
Spread step; spin-off; deceleration.
*'''1 TMPLT man disp Gyrset'''
Gyrset down; spin-off; deceleration; Gyrset up.
*'''1 TMPLT man disp Gyrset sprd'''
Gyrset down; spread step; spin-off; deceleration; Gyrset up.
==Automatic dispense==
*'''1 TMPLT aut disp SU8'''
Dispense; SU-8 string breaking; spread step; spin-off; deceleration.
*'''1 TMPLT aut disp SU8 Gyrset'''
Dispense; SU-8 string breaking; Gyrset down; spread step; spin-off; deceleration; Gyrset up.
*'''1 TMPLT aut disp'''
Dispense; spin-off; deceleration.
*'''1 TMPLT aut disp spread'''
Dispense; spread step; spin-off; deceleration.
*'''1 TMPLT aut disp Gyrset'''
Dispense; Gyrset down; spin-off; deceleration; Gyrset up.
*'''1 TMPLT aut disp Gyrset sprd'''
Dispense; Gyrset down; spread step; spin-off; deceleration; Gyrset up.