Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view& | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=400 Sputter coater 03] | ||