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Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions

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'''The user manual and contact information can be found in LabManager:'''  
'''The user manual and contact information can be found in LabManager:'''  


[http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 Sputter coater 03]
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=400 Sputter coater 03]