Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
| Line 160: | Line 160: | ||
*Not measured | *Not measured | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan=" | !style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range | ||
|style="background:LightGrey; color:black"|Pressure||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Pressure||style="background:WhiteSmoke; color:black"| | ||
*0.01 mbar (default value) | *0.01 mbar (default value) | ||