Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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==Overview of the performance of the Hummer sputter coater and some process related parameters== | ==Overview of the performance of the Hummer sputter coater and some process related parameters== | ||
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!style="background:silver; color:black;" align="left"|Purpose | |||
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*Gold sputter coating of different samples mainly before SEM characterization (see purpose) | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance | |||
|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | |||
*10 Å - > 25 nm | |||
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|style="background:LightGrey; color:black"|Deposition rate | |||
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*Not measured | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range | |||
|style="background:LightGrey; color:black"|Process Temperature | |||
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*Room temperature | |||
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|style="background:LightGrey; color:black"|Process pressure | |||
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*5*10<sup> -2</sup> mbar | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Batch size | |||
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*One sample smaller than a 100 mm wafer | |||
*Several smaller samples | |||
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| style="background:LightGrey; color:black"|Allowed materials | |||
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*All materials allowed in the cleanroom | |||
*Samples from outside the cleanroom, including biological samples | |||
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= The Sputter coater 03 (Cressington sputter coater) = | |||
[[image:Cressington_LA_1.jpg|300x300px|right|thumb|Sputter coater 03 (Cressington) located in the 346 basement, room 907]] | |||
The Sputter coater is used to sputter a thin gold layer on different small samples (smaller than 100 mm wafers). Itthe | |||
One of the most effective ways to counter problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The sputter coater allows you to coat small samples with a thin gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps, the gold layer will effectively eliminate all charging problems in the SEM. | |||
The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Supra 1) . | |||
'''The user manual and contact information can be found in LabManager:''' | |||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=303 Sputter coater 03] | |||
==Process knowledge== | |||
*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Gold|Deposition of gold]] | |||
==Overview of the performance of the Sputter coater 03 (Cressington) and some process related parameters== | |||
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