Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions
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|ZrO(2)/Y(2)O(3)|| || 99,900% || 63 || 0.5 | |ZrO(2)/Y(2)O(3)|| || 99,900% || 63 || 0.5 | ||
|- | |- | ||
|V|| || 99,500% || 188 || 20 | |V|| 0.125"|| 99,500% || 188 || 20 | ||
|- | |- | ||
|W|| || 99,500% || 314 || 20 | |W|| || 99,500% || 314 || 20 | ||