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Specific Process Knowledge/Thin film deposition/Lesker: Difference between revisions

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|style="background:WhiteSmoke; color:black"|'''target thickness'''
|style="background:WhiteSmoke; color:black"|'''target thickness'''
|style="background:WhiteSmoke; color:black"|'''Purity'''
|style="background:WhiteSmoke; color:black"|'''Purity'''
|style="background:WhiteSmoke; color:black"|'''Max. Power (W)'''
|style="background:WhiteSmoke; color:black"|'''Max Ramp up and down (W/s)'''
|-
|-
|Ag||    0,250"|| 99,9%
|Ag||    0,250"|| 99,9% || 471 || 10
|-
|-
||Al|| 0,250"|| 99,99%
||Al|| 0,250"|| 99,99%
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