Specific Process Knowledge/Etch/DRIE-Pegasus/processA

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Effects on Process A of showerhead change in December 2014

The effects of changing of the showerhead in December 2014 was investigated. Patterned wafers were processed before and after and the profile of the etched features were inspected in SEM. Click on the numbers in the 'Runs' column below to see the profiles.

Recipe	Name	Temp.	Deposition step						Etch step							Comments
			Time	Pres.	C4F8	SF6	O2	Coil	Time	Pres.	C4F8	SF6	O2	Coil	Platen	Showerhead	Runs	Key words
Process A	Step1 11 cyc	20	4	25	200	0	0	2000	7.0	25(1.5s) 90>>150	0	350(1.5s) 550	5	2800	120>>140(1.5s) 45	Old	1
	Step2 44 cyc		4	25	200	0	0	2000	7.0	25(1.5s) 150	0	350(1.5s) 550	5	2800	140(1.5s) 45
	Step1 11 cyc	20	4	25	200	0	0	2000	7.0	25(1.5s) 90>>150	0	350(1.5s) 550	5	2800	120>>140(1.5s) 45	New	1	Profile improved
	Step2 44 cyc		4	25	200	0	0	2000	7.0	25(1.5s) 150	0	350(1.5s) 550	5	2800	140(1.5s) 45

Process A acceptance test

Process A is labelled Large trench (80μm wide) 150μm depth. In the acceptance test the process was run on a 150 mm SPTS wafer with 12-13 % etch load.

Process A specifications

Parameter	Specification	Average result
Etch rate (µm/min)	> 15	18.9
Etched depth (µm)	150	189.1
Scallop size (nm)	< 800	718
Profile (degs)	91 +/- 1	91.1
Selectivity to AZ photoresist	> 150	310
Undercut (µm)	<1.5	0.84
Uniformity (%)	< 3.5	3.0
Repeatability (%)	<4	0.43

	Process A parameters
	Step 1		Step 2
Parameter	Etch	Dep	Etch	Dep
Gas flow (sccm)	SF6 350 (1.5 s) 550	C4F8 200	SF6 350 (1.5 s) 550	C4F8 200
Cycle time (secs)	7.0	4.0	7.0	4.0
Pressure (mtorr)	25 (1.5 s) 90 >> 150	25	25 (1.5 s) 150	25
Coil power (W)	2800	2000	2800	2000
Platen power (W)	120 >> 140 (1.5) 45	0	140 (1.5) 45	0
Cycles	11 (keep fixed)		44 (vary this)
Common	Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers

Quality control procedure

Quality Control (QC) for DRIE-Pegasus

The QC procedure for DRIE-Pegasus The newest QC data for DRIE-Pegasus QC Recipe: Process A Step 1: 11 cycles Step 2: 44 cycles QC limits DRIE-Pegasus Etch rate in Si 21 - 28 µm/min Non-uniformity 2  %

Process A guidelines

Process A is optimized for speed and depending on feature size and etch load it will achieve etch rates up to 25-30 µm/min.

This aggressive etch has a few drawbacks - one of which is the release of energy in the etch process. In general, it is clear that

1. The higher the etch rate, the higher rate of released energy.
2. The larger an area of silicon is exposed to plasma and hence etched, the higher rate of released energy.

Given its high etch rate, Process A is very sensible to high etch load processes and substrates with reduced cooling efficiency. Therefore, users are generally advised to

1. Use Process A with precaution at high etch loads - above some 50%.
2. Avoid using Process A on bonded wafers, in particular if the etch load is more than 5-10%. The bonding reduces the heat conduction across the wafer interface so the top wafer will immediately heat up and cause the mask to erode and the bonding polymer to melt.

If you have a bonded sandwich of wafers with very poor heat conduction (typically caused by intermediate polymer layers thicker than a few microns) you are advised to use other etch processes, maybe the deepetch on the ASE.

Process A performance

The perfomance of Process A has been investigated as a function of feature size and etch load.

Experiment

A number of wafers are patterned with the Travka mask set in AZ photoresist or 600 nm oxide. The wafers are then etched (batch recipe with 5 minute TDESC interstep cleans) using two different durations of process A in the DRIE-Pegasus.

Wafers Wafer number Mask Mask material Process A duration C01548.01 Travka 05 AZ photoresist 55 cycles, 10:05 mins C01548.02 Travka 10 AZ photoresist 55 cycles, 10:05 mins C01548.03 Travka 20 AZ photoresist 55 cycles, 10:05 mins C01548.04 Travka 35 AZ photoresist 55 cycles, 10:05 mins C01548.05 Travka 50 AZ photoresist 55 cycles, 10:05 mins

Wafers Wafer number Mask Mask material Process A duration C01549.01 Travka 05 600 nm oxide 110 cycles, 20:10 mins C01549.02 Travka 10 600 nm oxide 110 cycles, 20:10 mins C01549.03 Travka 20 600 nm oxide 110 cycles, 20:10 mins C01549.04 Travka 35 600 nm oxide 110 cycles, 20:10 mins

Results: Optical images

• Optical images of the C01548 batch that is processed 10:05 mins.
• 
  Wafer C01548.01: 5 % exposed area
• 
  Wafer C01548.02: 10 % exposed area
• 
  Wafer C01548.03: 20 % exposed area
• 
  Wafer C01548.04: 35 % exposed area
• 
  Wafer C01548.05: 50 % exposed area
• File:Without pre-etch measurements of the thicknesses of the photoresist it is not possible to determine the resist etch rate. However, it looks very uniform.

• Optical images of the C01549 batch that is processed 20:10 mins.
• 
  Wafer C01549.01: 5 % exposed area. Some 190 nm of 600 nm oxide remains.
• 
  Wafer C01549.02: 10 % exposed area. Some 122 nm oxide remains.
• 
  Wafer C01549.03: 20 % exposed area. In the centre some 90 nm oxide remains.
• 
  Wafer C01549.04: 35 % exposed area. In the centre some 90 nm oxide remains.
• 
  Wafer C01549.05: 35 % exposed area (close-up). The oxide has disappeared leaving the Si exposed.

The etching of silicon releases energy. This means that the faster the etch is, the more heat needs to be dissipated. The consequence is the same if a larger percentage of the wafer is etched. Process A is the fastest etch and as seen above, the exposed area plays an important role. As the exposed area increases the oxide mask erosion is more and more pronounced.

If a larger area is to be etched, the cooling must be made more efficient, either by lowering the platen temperature or with increasing the pressure of He on the backside of the wafer. This will be investigated soon.

Results: Etched depths in trenches of different widths

• Graphs
• 
  Process time 10:05
• 
  Process time 20:10

Process A variations May-June 2016

Process A may overpassivate producing grass. To investigate the results

Recipe	Temp.	Deposition step				Etch step						Comments
		Time	Pres.	C4F8	Coil	Time	Pressure	SF6	O2	Coil	Platen	Runs	Key words
PrA-0	20	4	25	200	2000	7.0	25(1.5s) 150	350(1.5s) 550	5	2800	140(1.5s) 45	1	Step 2 original recipe
PrA-1	20	3.5	25	200	2000	7.0	25(1.5s) 150	350(1.5s) 550	5	2800	140(1.5s) 45			1	Shorter dep cycle
PrA-2	20	4	25	150	2000	7.0	25(1.5s) 150	350(1.5s) 550	5	2800	140(1.5s) 45	1	Lower C4F8 flow in dep cycle