Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
Appearance
| Line 366: | Line 366: | ||
== Process A variations May-June 2016 == | == Process A variations May-June 2016 == | ||
Process A | |||
{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;" | |||
{| border="1" cellpadding="1" cellspacing=" | |||
|- | |- | ||
! rowspan="2" width="20"| Recipe | ! rowspan="2" width="20"| Recipe | ||