Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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== Effects on Process A of showerhead change in December 2014 == | == Effects on Process A of showerhead change in December 2014 == | ||
The effects of [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|changing of the showerhead in December 2014]] was investigated. | The effects of [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|changing of the showerhead in December 2014]] was investigated. Patterned wafers were processed before and after and the profile of the etched features were inspectede in SEM. | ||
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