LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/EMT Procces flow: Difference between revisions
Appearance
| Line 66: | Line 66: | ||
|Scanning Electron Microscopy inspection | |Scanning Electron Microscopy inspection | ||
|By cleaving the sample it is possible to inspect depositet ALD layers uniformity in cross-sectional mode | |By cleaving the sample it is possible to inspect depositet ALD layers uniformity in cross-sectional mode | ||
|[[Specific_Process_Knowledge/Characterization/SEM_Supra_2| | |[[Specific_Process_Knowledge/Characterization/SEM_Supra_2|SEM Supra 2]] | ||
|[[image:1 Lithography.jpg|250x350px|center]] | |[[image:1 Lithography.jpg|250x350px|center]] | ||
|- | |- | ||